Investigation of optoelectrical properties of indium oxide thin films with hydrogen and oxygen gas concentration variation during sputtering
Sign Up to like & getrecommendations! Published in 2020 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2020.105576
Abstract: Abstract We have investigated the optoelectrical properties of the In2O3 thin films deposited with hydrogen and oxygen gas concentration variation during the sputtering process. As-deposited films have shown amorphous nature and post-annealing treatment has led… read more here.
Keywords: oxygen; in2o3 films; optoelectrical properties; hydrogen oxygen ... See more keywords
High-Performance On-Chip Supercapacitors Based on Mesoporous Silicon Coated with Ultrathin Atomic Layer-Deposited In2O3 Films.
Sign Up to like & getrecommendations! Published in 2019 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.8b17093
Abstract: On-chip supercapacitors have attracted considerable attention because of their high power density, long cycling life, and compatibility with integrated circuits. One critical drawback that restricts their practical application is the low energy density. In this… read more here.
Keywords: in2o3 films; atomic layer; mesoporous silicon; chip supercapacitors ... See more keywords