CMOS-compatible a-Si metalenses on a 12-inch glass wafer for fingerprint imaging
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DOI: 10.1515/nanoph-2019-0470
Abstract: Abstract Metalenses made of artificial sub-wavelength nanostructures have shown the capability of light focusing and imaging with a miniaturized size. Here, we report the demonstration of mass-producible amorphous silicon metalenses on a 12-inch glass wafer… read more here.
Keywords: metalenses inch; glass wafer; fingerprint; inch glass ... See more keywords