12-inch X-ray optics based on MEMS process
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DOI: 10.1007/s00542-016-2980-6
Abstract: A large size X-ray optic with a 12-inch silicon wafer is fabricated to increase X-ray collecting power. The 12-inch silicon optic is formed by a combination of photolithography, dry etching and chemical mechanical polishing techniques.… read more here.
Keywords: surface; optics; inch ray; optics based ... See more keywords