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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13101569
Abstract: The inclination effect caused by fabrication errors on the periodic response of a symmetric MEMS gyroscope is investigated. The dynamic equation is established considering the inclination effect on support stiffness and electrostatic forces. The periodic…
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Keywords:
inclination;
effect;
inclination effect;
mems gyroscope ... See more keywords