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Inclination Effect on the Periodic Response of a Symmetrical MEMS Gyroscope

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Published in 2022 at "Micromachines"

DOI: 10.3390/mi13101569

Abstract: The inclination effect caused by fabrication errors on the periodic response of a symmetric MEMS gyroscope is investigated. The dynamic equation is established considering the inclination effect on support stiffness and electrostatic forces. The periodic… read more here.

Keywords: inclination; effect; inclination effect; mems gyroscope ... See more keywords