Inclination Effect on the Periodic Response of a Symmetrical MEMS Gyroscope
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13101569
Abstract: The inclination effect caused by fabrication errors on the periodic response of a symmetric MEMS gyroscope is investigated. The dynamic equation is established considering the inclination effect on support stiffness and electrostatic forces. The periodic… read more here.
Keywords: inclination; effect; inclination effect; mems gyroscope ... See more keywords