Soft X-ray absorption study of tantalum incorporation in titanium oxide films: Impact of flash-lamp annealing
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DOI: 10.1016/j.ceramint.2020.03.121
Abstract: Abstract The impact of Ta incorporation (up to ~21 at.%) in titanium dioxide (TiO2) films subjected to post-deposition millisecond-range flash-lamp annealing (FLA) is addressed. Phase formation with short-range information was established by means of soft X-ray… read more here.
Keywords: ray absorption; ray; flash lamp; lamp annealing ... See more keywords