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Published in 2020 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2020.146383
Abstract: Abstract Indicone films consisting of indium and organic aromatic linker are grown by molecular layer deposition (MLD) using diethyl[1,1,1-trimethyl-N-(trimethylsilyl)-silanaminato]-indium (INCA-1) as the indium precursor and hydroquinone (HQ) as the organic precursor. A constant growth rate…
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Keywords:
hybrid thin;
thin films;
indicone;
layer deposition ... See more keywords