Study of indium catalyst thickness effect on PECVD-grown silicon nanowires properties
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DOI: 10.1007/s10854-017-6722-z
Abstract: In this work, we focus on the elaboration at low temperature of metal-catalyzed silicon nanowires (SiNWs) obtained by vapor–liquid–solid (VLS) process. In particular, the effect of the metal thickness on SiNWs properties is reported. SiNWs… read more here.
Keywords: silicon nanowires; pecvd; indium catalyst; effect ... See more keywords