Effects of indium surfactant and MgN intermediate layers on surface morphology and crystalline quality of nonpolar a-plane AlGaN epi-layers
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DOI: 10.1016/j.ijleo.2019.162978
Abstract: Abstract High quality non-polar a -plane AlGaN epi-layers with dual MgN interlayers were successfully grown on semi-polar r -plane sapphire substrates with the indium-surfactant-assisted metal organic chemical vapor disposition (MOCVD) technology, and characterized with atomic… read more here.
Keywords: algan epi; quality; surface morphology; plane algan ... See more keywords