Studies of the confinement at laser-induced backside dry etching using infrared nanosecond laser pulses
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DOI: 10.1016/j.apsusc.2017.08.099
Abstract: Abstract In the present study, laser-induced backside etching of SiO 2 at an interface to an organic material using laser pulses with a wavelength of λ = 1064 nm and a pulse length of τ = 7 ns have been performed… read more here.
Keywords: induced backside; laser; surface; laser pulses ... See more keywords