Focused electron beam induced deposition meets materials science
Sign Up to like & getrecommendations! Published in 2017 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2017.10.012
Abstract: Abstract Focused electron beam induced deposition (FEBID) is a direct-write method for the fabrication of nanostructures whose lateral resolution rivals that of advanced electron beam lithography but is in addition capable of creating complex three-dimensional… read more here.
Keywords: induced deposition; beam induced; materials science; electron beam ... See more keywords
3D Nanostructures Grown via Focused Helium Ion Beam Induced Deposition
Sign Up to like & getrecommendations! Published in 2018 at "Microscopy and Microanalysis"
DOI: 10.1017/s1431927618002155
Abstract: The next generation of advanced computing devices will require complex nanoscale frameworks that extend into 3D. Focused ion beam induced deposition (FIBID), uses an organometallic precursor gas in a field ion microscope to fabricate nanoscale… read more here.
Keywords: induced deposition; ion beam; beam induced; deposition ... See more keywords
Focused Soft X-Ray Beam Induced Deposition: Recent Advances to a Novel Approach for Fabrication of Metallic Nanostructures
Sign Up to like & getrecommendations! Published in 2018 at "Microscopy and Microanalysis"
DOI: 10.1017/s1431927618012965
Abstract: 1. Physical Chemistry II, Friedrich-Alexander-Univers ität Erlangen-Nürnberg, Erlangen, Germany. 2. present address: Carl Zeiss Semiconductor Manufact uring Technology, Roßdorf, Germany. 3. Elettra-Sincrotrone Trieste, Area Science Park, Tr ieste, Italy. 4. Swiss Light Source, Paul Scherrer… read more here.
Keywords: deposition recent; induced deposition; beam induced; focused soft ... See more keywords
Epitaxial growth via anti-solvent-induced deposition towards a highly efficient and stable Mn4+ doped fluoride red phosphor for application in warm WLEDs
Sign Up to like & getrecommendations! Published in 2019 at "Journal of Materials Chemistry C"
DOI: 10.1039/c9tc01433k
Abstract: We report epitaxial growth via simple ethanol-induced deposition to enhance the luminescence and moisture resistance of K2SiF6:Mn4+. read more here.
Keywords: epitaxial growth; via anti; growth via; induced deposition ... See more keywords
Superconducting properties of in-plane W-C nanowires grown by He+Focused Ion Beam Induced Deposition.
Sign Up to like & getrecommendations! Published in 2020 at "Nanotechnology"
DOI: 10.1088/1361-6528/abc91c
Abstract: Focused Ion Beam Induced Deposition (FIBID) is a nanopatterning technique that makes use of a focused beam of charged ions to decompose a gaseous precursor. So far, the flexible patterning capabilities of FIBID have been… read more here.
Keywords: induced deposition; ion beam; beam induced; focused ion ... See more keywords
Nanowire Magnetic Force Sensors Fabricated by Focused-Electron-Beam-Induced Deposition
Sign Up to like & getrecommendations! Published in 2020 at "Physical Review Applied"
DOI: 10.1103/physrevapplied.13.044043
Abstract: We demonstrate the use of individual magnetic nanowires (NWs), grown by focused electron beam induced deposition (FEBID), as scanning magnetic force sensors. Measurements of their mechanical susceptibility, thermal motion, and magnetic response show that the… read more here.
Keywords: focused electron; beam induced; force sensors; electron beam ... See more keywords
Low-energy electron interaction and focused electron beam-induced deposition of molybdenum hexacarbonyl (Mo(CO)6)
Sign Up to like & getrecommendations! Published in 2022 at "Beilstein Journal of Nanotechnology"
DOI: 10.3762/bjnano.13.13
Abstract: Motivated by the potential role of molybdenum in semiconductor materials, we present a combined theoretical and experimental gas-phase study on dissociative electron attachment (DEA) and dissociative ionization (DI) of Mo(CO)6 in comparison to focused electron… read more here.
Keywords: beam induced; induced deposition; focused electron; deposition ... See more keywords
Formation mechanisms of boron oxide films fabricated by large-area electron beam-induced deposition of trimethyl borate
Sign Up to like & getrecommendations! Published in 2018 at "Beilstein Journal of Nanotechnology"
DOI: 10.3762/bjnano.9.120
Abstract: Boron-containing materials are increasingly drawing interest for the use in electronics, optics, laser targets, neutron absorbers, and high-temperature and chemically resistant ceramics. In this article, the first investigation into the deposition of boron-based material via… read more here.
Keywords: induced deposition; beam induced; deposition; boron ... See more keywords