Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase
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DOI: 10.1063/1.5000144
Abstract: Inductive discharges with radio-frequency (RF) substrate bias are frequently used for various technological applications. We operate such a hybrid discharge with a phase-locked RF substrate bias at twice the frequency of the inductive coupling with… read more here.
Keywords: phase; adjustable phase; inductive discharges; power coupling ... See more keywords