Novel on-chip spiral inductors with back hollow structure
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DOI: 10.1142/s0217984916504303
Abstract: In this work, on-chip spiral inductors with back hollow structure have been prepared on the 500 μm thick silicon substrate with high resistivity (ρ > 5000Ωcm). The silicon underneath the inductor r... read more here.
Keywords: hollow structure; inductors back; spiral inductors; chip spiral ... See more keywords