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Published in 2021 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2021.3081465
Abstract: A self-powered micro-electromechanical systems (MEMS) inertial switch has been proposed for potential wake-up application without additional power consumption. In comparison with the previous inertial switches powered by constant voltage sources, the proposed device embedded with…
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Keywords:
power;
inertial switch;
self powered;
mems inertial ... See more keywords
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Published in 2021 at "Micromachines"
DOI: 10.3390/mi12040440
Abstract: An omnidirectional inertial switch with rectangular spring is proposed in this paper, and the prototype has been fabricated by surface micromachining technology. To evaluate the threshold consistency and stability of omnidirectional inertia switch, the stiffness…
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Keywords:
direction;
omnidirectional inertial;
switch;
suspension ... See more keywords
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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13030359
Abstract: As a typical type of MEMS acceleration sensor, the inertial switch can alter its on-off state while the environmental accelerations satisfy threshold value. An exhaustive summary of the design concept, performance aspects, and fabrication methods…
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Keywords:
research progress;
inertial switch;
inertial switches;
mems inertial ... See more keywords