Research Progress of MEMS Inertial Switches
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DOI: 10.3390/mi13030359
Abstract: As a typical type of MEMS acceleration sensor, the inertial switch can alter its on-off state while the environmental accelerations satisfy threshold value. An exhaustive summary of the design concept, performance aspects, and fabrication methods… read more here.
Keywords: research progress; inertial switch; inertial switches; mems inertial ... See more keywords