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Published in 2023 at "Optics letters"
DOI: 10.1364/ol.479854
Abstract: Mid-infrared dielectric metasurfaces are promising fundamental building blocks for integrated sensing with high sensitivity, compositional selectivity, and low loss. We have designed and fabricated a silicon metasurface with resonance properties in the 4∼5 µm mid-infrared region…
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Keywords:
field enhancement;
silicon metasurfaces;
mid infrared;
infrared silicon ... See more keywords