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Published in 2018 at "Optical Materials Express"
DOI: 10.1364/ome.8.002991
Abstract: The concentrations of N (CN) and interstitial metal defects (CMi) and the film thickness (d) dependent microstructure and optical and electrical properties of InGaZnON thin films deposited by RF sputtering are studied. The thin films…
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Keywords:
thin films;
aligned crystalline;
axis aligned;
optical electrical ... See more keywords