Rapid and localized ion-beam etching of surfaces using initial notches.
Sign Up to like & getrecommendations! Published in 2018 at "Micron"
DOI: 10.1016/j.micron.2018.01.002
Abstract: Glancing-angle Ar+ broad ion beam erosion is widely used for the preparation of high-quality transmission electron microscopy (TEM) samples. However, low erosion rates and lack of site specificity are major drawbacks of the method. Being… read more here.
Keywords: initial notches; rapid localized; ion beam; ion ... See more keywords