The effect of the type of conductivity on the initiation and formation of pores in silicon during electrochemical etching
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DOI: 10.1134/s0012500817120011
Abstract: The effect of the type of Si conductivity on the initiation and formation of pores in silicon samples during electrochemical etching was studied. The difference between the pore formation processes in n- and p-conducting silicon… read more here.
Keywords: conductivity initiation; chemistry; formation; effect type ... See more keywords