A comparative study of InN growth on quartz, silicon, C-sapphire and bulk GaN substrates by RF magnetron sputtering
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DOI: 10.1007/s10854-017-6657-4
Abstract: In this work, we investigate the growth of indium nitride (InN) films on quartz, bulk GaN, sapphire (001) and Si (111) substrates. An InN buffer layer was first deposited on all the substrates, then an… read more here.
Keywords: inn buffered; sapphire; comparative study; growth ... See more keywords