Highly Stable Thin-Film Transistors Based on Indium Oxynitride Semiconductor.
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DOI: 10.1021/acsami.8b02678
Abstract: In this study, the properties of indium oxynitride (InON) semiconductor films grown by reactive radio frequency sputtering were examined both experimentally and theoretically. Also, thin-film transistors (TFTs) incorporating InON as the active layer were evaluated… read more here.
Keywords: based indium; inon; semiconductor; thin film ... See more keywords