High-temperature-capable ALD-based inorganic lift-off process
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DOI: 10.1016/j.mssp.2021.105809
Abstract: Abstract Lift-off is a useful method to pattern metals or other materials in semiconductor device fabrication. Polymer photoresists are commonly used for lift-off; however, these resists cannot be used when the device fabrication requires high… read more here.
Keywords: process; inorganic lift; high temperature; lift ... See more keywords