Development of a Linear Piezoelectric Microactuator Inspired by the Hollowing Art
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DOI: 10.1109/tie.2022.3152008
Abstract: Microactuators have been playing crucial roles in micromachine technologies because of their small sizes and light weights. The piezoelectric actuation is one of the most important driving methods to perform the motion output with miniature… read more here.
Keywords: linear piezoelectric; development linear; inspired hollowing; piezoelectric microactuator ... See more keywords