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Published in 2017 at "Applied Optics"
DOI: 10.1364/ao.56.001460
Abstract: Planetary substrate rotation for optical-coating deposition is evaluated based on initial and final positions for a given layer with different numbers of revolutions and various deposition-source locations. The influence of partial revolutions of the rotation…
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Keywords:
revolutions distribution;
integer planetary;
non integer;
planetary revolutions ... See more keywords