Characterization of an Acetone Detector Based on a Suspended WO3-Gate AlGaN/GaN HEMT Integrated With Microheater
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DOI: 10.1109/ted.2019.2936912
Abstract: A suspended AlGaN/GaN high electron mobility transistor (HEMT) sensor with a tungsten trioxide (WO3) nanofilm modified gate was microfabricated and characterized for ppm-level acetone gas detection. The sensor featured a suspended circular membrane structure and… read more here.
Keywords: algan gan; integrated microheater; acetone; gate ... See more keywords