LAUSR

Integrated opto‐mechanical cantilever sensor with a rib waveguide

Sign Up to like & get
recommendations!
0 Published in 2022 at "Journal of Microscopy"

DOI: 10.1111/jmi.13097

Abstract: An integrated opto‐mechanical cantilever sensor with a rib waveguide is reported in this paper. The device consists of a rib waveguide cantilever with buried waveguides on silicon. The rib cantilever is introduced to match better… read more here.

Keywords: rib waveguide; cantilever; integrated opto; opto mechanical ... See more keywords