Electron beam lithography inscribed varied-line-spacing and uniform integrated reflective plane grating fabricated through line-by-line method
Sign Up to like & getrecommendations! Published in 2021 at "Optics and Lasers in Engineering"
DOI: 10.1016/j.optlaseng.2020.106456
Abstract: Abstract A varied-line-spacing (VLS) and uniform integrated reflective plane grating was inscribed by electron beam lithography (EBL) and reactive ion etching method, and its displacement sensing characteristics was tested. For the VLS grating, the groove… read more here.
Keywords: integrated reflective; reflective plane; uniform integrated; varied line ... See more keywords
Surface optimization of micro-integrated reflective optical elements by thermoset injection molding
Sign Up to like & getrecommendations! Published in 2020 at "Applied Sciences"
DOI: 10.18419/opus-10898
Abstract: Thermoset materials offer a multitude of advantageous properties in terms of shrinkage and warpage as well as mechanical, thermal and chemical stability compared to thermoplastic materials. Thanks to these properties, thermosets are commonly used to… read more here.
Keywords: surface; integrated reflective; injection; thermoset components ... See more keywords