Three-Dimensional Integration of InAs Nanowires by Template-Assisted Selective Epitaxy on Tungsten.
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DOI: 10.1021/acs.nanolett.2c04908
Abstract: 3D integration of III-V semiconductors with Si CMOS is highly attractive since it allows combining new functions such as photonic and analog devices with digital signal processing circuitry. Thus far, most 3D integration approaches have… read more here.
Keywords: integration inas; assisted selective; integration; epitaxy ... See more keywords