Transfer Print Integration of Waveguide-Coupled Germanium Photodiodes Onto Passive Silicon Photonic ICs
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DOI: 10.1109/jlt.2017.2777509
Abstract: We demonstrate the integration of waveguide-coupled germanium photodiodes onto passive silicon waveguide circuits by means of transfer printing. This involves the release of the photodiodes from the silicon-on-insulator source wafer by underetching the buried oxide… read more here.
Keywords: germanium photodiodes; waveguide coupled; integration waveguide; waveguide ... See more keywords