A patch-interactive enhancement network for semiconductor wafer map mixed defect recognition with a two-stage training strategy
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DOI: 10.1088/1361-6501/adbc0d
Abstract: To improve the product quality and process reliability in the semiconductor manufacturing, it is of great significance to detect the defect of the wafer map and recognize the defect pattern. With the increase in the… read more here.
Keywords: patch interactive; interactive enhancement; recognition; wafer map ... See more keywords