Ag metal interconnect wires formed by pseudoplastic nanoparticles fluid imprinting lithography with microwave assistant sintering
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DOI: 10.1088/1361-6528/ac5eeb
Abstract: Nanoimprint technology has the advantages of low cost, high precision, high fidelity and high yield. The metal nanoparticle fluid is non-Newtonian fluid, which is used as the imprint transfer medium to realize high fidelity of… read more here.
Keywords: lithography; microwave sintering; interconnect wires; metal interconnect ... See more keywords