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Published in 2021 at "ACS Applied Materials & Interfaces"
DOI: 10.1021/acsami.1c06210
Abstract: In this paper, we present a detailed study on the microstructure evolution and interdiffusion in Nb/Si-layered systems. Interlayer formation during the early stages of growth in sputter-deposited Nb-on-Si and Si-on-Nb bilayer systems is studied in…
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Keywords:
layered systems;
evolution interdiffusion;
interdiffusion;
texture evolution ... See more keywords