Fabricating Three-Dimensional Periodic Micro Patterns on Photo-Resists Using Laser Interference Lithographyâ€
Sign Up to like & getrecommendations! Published in 2017 at "Advanced Engineering Materials"
DOI: 10.1002/adem.201600855
Abstract: Springtails are hexapods, which have a complex skin surface composed of periodically arranged mushroom-like features. This topography offers surface functionalities like non-wetting and preventing bacterial settlement. This study demonstrates a novel way of replicating the… read more here.
Keywords: photo; interference lithography; micro patterns;
Large scale fabrication of asymmetric 2D and 3D micro/nano array pattern structures using multi-beam interference lithography technique for Solar cell texturing application
Sign Up to like & getrecommendations! Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-018-3742-4
Abstract: A method for the large scale fabrication of nano/micro array patterned structure for solar Photovoltaics (PV) is demonstrated by the use of laser interference lithography (LIL) technique. Since micro/nano array patterned structures for photonic arrangement… read more here.
Keywords: technique; array; fabrication; pattern structures ... See more keywords
High-Resolution Quantum Dot Photopatterning via Interference Lithography Assisted Microstamping
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Physical Chemistry C"
DOI: 10.1021/acs.jpcc.7b03731
Abstract: We present novel photopatterning approaches based on near-field and far-field interference lithography techniques that yield highly uniform high-resolution large-area face-profile and edge-profile photopatterns. The near-field interference methods utilize a phase-shift mask while the far-field method… read more here.
Keywords: resolution; high resolution; field; interference ... See more keywords
Fabrication of 4-Inch Nano Patterned Wafer with High Uniformity by Laser Interference Lithography
Sign Up to like & getrecommendations! Published in 2018 at "Chinese Physics Letters"
DOI: 10.1088/0256-307x/35/5/054207
Abstract: We report the fabrication of 4-inch nano patterned wafer by two-beam laser interference lithography and analyze the uniformity in detail. The profile of the dots array with a period of 800 nm divided into five… read more here.
Keywords: laser interference; interference lithography; uniformity;
Freestanding carbon nanomembranes and graphene monolayers nanopatterned via EUV interference lithography
Sign Up to like & getrecommendations! Published in 2019 at "2D Materials"
DOI: 10.1088/2053-1583/ab0014
Abstract: Two-dimensional materials, such as graphene, molecular nanosheets, hexagonal boron nitride or transition metal dichalcogenides have recently attracted substantial interest due to their potential use in electronics, chemical and biological sensors, nanooptics, and catalysis. For most… read more here.
Keywords: interference lithography; carbon nanomembranes; freestanding carbon; graphene ... See more keywords
Comprehensive theoretical analysis of the period chirp in laser interference lithography.
Sign Up to like & getrecommendations! Published in 2022 at "Applied optics"
DOI: 10.1364/ao.451873
Abstract: We present a theoretical investigation on laser interference lithography used for the exposure of linear gratings. The focus is on the geometry of the arising interference lines on the substrate, in particular on their period… read more here.
Keywords: period; point sources; interference; geometry ... See more keywords
General mathematical model for the period chirp in interference lithography.
Sign Up to like & getrecommendations! Published in 2023 at "Optics express"
DOI: 10.1364/oe.481887
Abstract: We present a general analytical model for the calculation of the spatial distribution of the grating period, enabling the unification of all configurations of classical laser interference lithography (LIL) and scanning-beam interference lithography (SBIL) into… read more here.
Keywords: period; interference; general mathematical; model ... See more keywords
Fabrication of helical photonic structures with submicrometer axial and spatial periodicities following "inverted umbrella" geometry through phase-controlled interference lithography.
Sign Up to like & getrecommendations! Published in 2018 at "Optics letters"
DOI: 10.1364/ol.43.000106
Abstract: In this Letter we report for the first time, to the best of our knowledge, a phase spatial light modulator (SLM)-based interference lithography (IL) approach for the realization of hexagonally packed helical photonic structures with… read more here.
Keywords: helical photonic; phase; photonic structures; structures submicrometer ... See more keywords
Enhanced sensing performance from trapezoidal metallic gratings fabricated by laser interference lithography.
Sign Up to like & getrecommendations! Published in 2022 at "Optics letters"
DOI: 10.1364/ol.450151
Abstract: Nanograting-based plasmonic sensors are widely regarded as promising platforms due to their real-time label-free detection and ease of integration. However, many reported grating structures are too complicated to fabricate, which limits their application. We propose… read more here.
Keywords: sensing performance; interference lithography; laser interference; trapezoidal ... See more keywords
Patent Review on Laser Interference Lithography Technique for Producing Periodic Nanostructure.
Sign Up to like & getrecommendations! Published in 2018 at "Recent patents on nanotechnology"
DOI: 10.2174/1872210512666180806141624
Abstract: BACKGROUND Because line width has been close to atom size, for semiconductor industry, except for achieving the target of line width, the cost will be more important. The mask-less laser interference lithography (LIL) technique lowers… read more here.
Keywords: technique; interference lithography; lil; patent ... See more keywords