Accurate mechanical-optical theoretical model of cross-axis sensitivity of an interferometric micro-optomechanical accelerometer.
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DOI: 10.1364/ao.447762
Abstract: An interferometric micro-optomechanical accelerometer usually has ultrahigh sensitivity and accuracy. However, cross-axis interference inevitably degrades the performance, including its detection accuracy and output signal contrast. To accurately clarify the influence of cross-axis interference, a modified… read more here.
Keywords: interferometric micro; micro optomechanical; cross; cross axis ... See more keywords