Heterogeneous integration of LN and Si3N4 waveguides using an optical interlayer coupler
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DOI: 10.1016/j.optcom.2018.11.058
Abstract: Abstract Integrated optical gyros (IOG) draw attention due to the remarkable promise of miniaturization, mass-manufacturability and high reliability. However, the wafer-scale integration of these devices is not available. A heterogeneous platform of lithium niobate (LN)… read more here.
Keywords: interlayer; si3n4; coupler; optical interlayer ... See more keywords