Intrasheath electron dynamics in low pressure capacitively coupled plasmas
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DOI: 10.1088/1361-6595/abe728
Abstract: We present a detailed analysis of electron trajectories within the sheath regions of capacitively coupled plasmas excited by radio-frequency voltage waveforms at low pressures. Complex features inside the sheaths are identified in several physical quantities,… read more here.
Keywords: electron dynamics; coupled plasmas; capacitively coupled; intrasheath electron ... See more keywords