Introduction and application of a new approach for model-based optical bidirectional measurements
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DOI: 10.1088/1361-6501/ad4b53
Abstract: Accurate measurements of micro- and nanoscale features in optical microscopy demand comprehensive modelling approaches. In this study, we introduce an enhanced evaluation method, utilizing rigorous simulations based on a finite element method algorithm within an… read more here.
Keywords: application new; approach model; introduction application; model based ... See more keywords