Model-driven convolution neural network for inverse lithography.
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DOI: 10.1364/oe.26.032565
Abstract: Optical lithography is a fundamental process to fabricate integrated circuits, which are the basic fabric of the information age. Due to image distortions inherent in optical lithography, inverse lithography techniques (ILT) are extensively used by… read more here.
Keywords: inverse lithography; network; optical lithography; model ... See more keywords
Fast implicit active contour model for inverse lithography.
Sign Up to like & getrecommendations! Published in 2021 at "Optics express"
DOI: 10.1364/oe.418300
Abstract: We combine the ideas from level-set methods in computer vision and inverse imaging to derive a generalized active contour model for inverse lithography problems endowed with a locally implemented semi-implicit difference scheme. We introduce a… read more here.
Keywords: model inverse; inverse lithography; active contour; inverse ... See more keywords