Preparation of poly-Si films by inverted AIC process on graphite substrate
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Crystal Growth"
DOI: 10.1016/j.jcrysgro.2017.09.016
Abstract: Abstract Graphite/a-Si/Al laminated structures were deposited on graphite substrate using magnetron sputtering technology. The substrate temperature of amorphous silicon (a-Si) deposition and the Al/Si thickness ratio have strong influences on a-Si crystallization, various conditions were… read more here.
Keywords: aic process; inverted aic; graphite substrate; poly ... See more keywords