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Published in 2025 at "Journal of Applied Physics"
DOI: 10.1063/5.0293610
Abstract: In this publication, we study strain in κ-(InxGa1−x)2O3/κ-Ga2O3/Al2O3 heterostructures grown by plasma-assisted molecular beam epitaxy using a combination of density functional theory (DFT), x-ray diffraction (XRD), nanobeam electron diffraction (NBED), and energy-dispersive x-ray spectroscopy (EDX)…
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Keywords:
lattice parameters;
inxga1 2o3;
diffraction;
2o3 ga2o3 ... See more keywords
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Published in 2024 at "Science and Technology of Advanced Materials"
DOI: 10.1080/14686996.2024.2414733
Abstract: ABSTRACT This study investigates the compositional analysis and growth of β-(InxGa1-x)2O3 thin films on (010) β-Ga2O3 substrates using mist chemical vapor deposition (CVD), including the effects of the growth temperature. We investigated the correlation between…
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Keywords:
composition;
thin films;
inxga1 2o3;
coherently grown ... See more keywords