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Published in 2019 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2018.12.033
Abstract: Abstract In the work, novel indium yttrium oxide (InYO) thin films are prepared by an environmentally friendly aqueous solution process. Y element is added to suppress the generation of oxygen vacancies. The effect of Y…
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Keywords:
inyo thin;
nontoxic water;
water induced;
induced inyo ... See more keywords