On Independence of the Thermal-Spike Temperature in Pure Metals of the Implanted Ion Energy and Atomic Mass
Sign Up to like & getrecommendations! Published in 2020 at "Russian Physics Journal"
DOI: 10.1007/s11182-020-01915-w
Abstract: The optical emission spectra of pure metals Fe, Zr, Ta and W are measured during their irradiation with Ar + , Kr + and Xe + ions (5, 10, 15 and 20 keV). It is… read more here.
Keywords: spike temperature; energy; ion; ion energy ... See more keywords
Impact of heavy ion energy and species on single-event upset in commercial floating gate cells
Sign Up to like & getrecommendations! Published in 2021 at "Microelectronics Reliability"
DOI: 10.1016/j.microrel.2021.114128
Abstract: Abstract The impact of heavy ion energy and species on single-event upsets (SEU) sensitivity in state-of-the-art NAND Flash memories is investigated in this paper. Experimental results indicate that the heavy ion with the same linear-energy-transfer… read more here.
Keywords: impact heavy; heavy ion; ion energy; ion ... See more keywords
Effects of He ion energy on blistering characteristics of Si sequentially implanted with H and He ions in various sequences
Sign Up to like & getrecommendations! Published in 2018 at "Surface and Coatings Technology"
DOI: 10.1016/j.surfcoat.2018.01.085
Abstract: Abstract As compared to the conventional smart-cut technology based on single H ion implantation, sequential implantation of H and He ions has been demonstrated to be effective in reducing the implantation fluence and the thermal… read more here.
Keywords: energy; blistering characteristics; sequential implantation; ion energy ... See more keywords
High-ion-energy and low-temperature deposition of diamond-like carbon (DLC) coatings with pulsed kV bias
Sign Up to like & getrecommendations! Published in 2019 at "Surface and Coatings Technology"
DOI: 10.1016/j.surfcoat.2018.08.099
Abstract: Abstract The high ion energy produced by the substrate bias is essential to the enhancement of the sp3 content in diamond-like carbon (DLC) coatings and adhesion with the substrate. However, excessive ion energy can turn… read more here.
Keywords: high ion; ion energy; dlc coatings; ion ... See more keywords
Inducing locally structured ion energy distributions in intermediate-pressure plasmas
Sign Up to like & getrecommendations! Published in 2019 at "Physics of Plasmas"
DOI: 10.1063/1.5111401
Abstract: Ion energy distribution functions (IEDFs) incident upon material surfaces in radio frequency (rf) capacitively coupled plasmas are coupled to spatial and temporal sheath dynamics. Tailoring the ion energy distribution function within intermediate-pressure plasmas (≈133 Pa, 1 Torr),… read more here.
Keywords: voltage; energy; intermediate pressure; ion ... See more keywords
Numerical investigation of ion energy and angular distributions in a dc-biased H2 inductively coupled discharge
Sign Up to like & getrecommendations! Published in 2020 at "Physics of Plasmas"
DOI: 10.1063/5.0012770
Abstract: The ion energy and angular distributions of H+, H 2 +, and H 3 + impinging on an extraction aperture (3 mm in radius) have been investigated with a hybrid model of an inductively coupled H2… read more here.
Keywords: energy angular; ion; ion energy; inductively coupled ... See more keywords
Investigation of the dual-frequency bias effect on inductively coupled Cl2 plasmas by hybrid simulation
Sign Up to like & getrecommendations! Published in 2023 at "Journal of Physics D: Applied Physics"
DOI: 10.1088/1361-6463/acdaa7
Abstract: In the etching process, a bias source is usually applied to the bottom electrode in inductively coupled plasmas (ICPs) to achieve independent control of the ion flux and ion energy. In this work, a hybrid… read more here.
Keywords: ion energy; frequency; inductively coupled; ion ... See more keywords
Equivalent electric circuit model of accurate ion energy control with tailored waveform biasing
Sign Up to like & getrecommendations! Published in 2022 at "Plasma Sources Science and Technology"
DOI: 10.1088/1361-6595/ac4c27
Abstract: For atomic scale plasma processing involving precise, (an)isotropic and selective etching and deposition, it is required to precisely control the energy of the plasma ions. Tailored waveforms have been employed to bias the substrate table… read more here.
Keywords: energy; electric circuit; equivalent electric; ion energy ... See more keywords
Ion energy distribution in an electron beam ion trap inferred from simulations of the trapped ion cloud.
Sign Up to like & getrecommendations! Published in 2022 at "Physical review. E"
DOI: 10.1103/physreve.105.015204
Abstract: We have inferred the energy distribution of trapped ions in an electron beam ion trap (EBIT) from simulations of the spatial distribution of Fe^{13+} ions and a comparison with measured visible light images of the… read more here.
Keywords: ion energy; energy; electron beam; distribution ... See more keywords
Nanoscale pattern formation produced by ion bombardment of a rotating target: The decisive role of the ion energy.
Sign Up to like & getrecommendations! Published in 2023 at "Physical review. E"
DOI: 10.1103/physreve.107.014801
Abstract: We study the nanoscale patterns that form on the surface of a rotating sample of an elemental material that is bombarded with a broad noble gas ion beam for angles of incidence θ just above… read more here.
Keywords: ion energy; energy; nanoscale pattern; pattern formation ... See more keywords
Pulsation Effects of Incident Ion Energy on W Fuzz Growth
Sign Up to like & getrecommendations! Published in 2018 at "Plasma and Fusion Research"
DOI: 10.1585/pfr.13.1205001
Abstract: Fuzzy nanostructure growth occurs on tungsten (W) surfaces by the exposure to helium (He) plasmas. We investigated pulsation effect in the incident energy of He ions on W fuzz growth. It is shown that He… read more here.
Keywords: incident ion; energy; ion energy; fuzz growth ... See more keywords