Articles with "ion sputtering" as a keyword



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Simulations of ion sputtering at Ganymede

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Published in 2020 at "Icarus"

DOI: 10.1016/j.icarus.2020.113918

Abstract: Abstract Ganymede's surface is subject to constant bombardment by Jovian magnetospheric and Ganymede's ionospheric ions. These populations sputter the surface and contribute to the replenishment of the moon's exosphere. Thus far, estimates for sputtering on… read more here.

Keywords: ion sputtering; contribution; simulations ion; ionospheric ions ... See more keywords
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Numerical simulation of the cathode erosion by ion sputtering in hollow cathode arc discharges

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Published in 2021 at "Physics of Plasmas"

DOI: 10.1063/5.0039652

Abstract: Cathode erosion by ion sputtering is one of the primary erosion mechanisms in hollow cathode discharges. In this paper, the moving mesh approach coupling with a two-dimensional plasma fluid model was employed to simulate the… read more here.

Keywords: ion sputtering; cathode; erosion; hollow cathode ... See more keywords
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Flux-dependent Epitaxial Recrystallization of Amorphized Si(111) Layers Due to Oblique Argon Ion Sputtering

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Published in 2020 at "Integrated Ferroelectrics"

DOI: 10.1080/10584587.2019.1675010

Abstract: Abstract Si(111) substrates, having more atoms available at the surface, are currently being exploited for nano-device fabrication. Epitaxial recrystallization of Si(111) layers amorphized under 80 keV Ar+ ion sputtering at off-normal incidence of 50° with 1 × 1017… read more here.

Keywords: recrystallization; ion sputtering; epitaxial recrystallization; flux dependent ... See more keywords
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Nonlinear effects in low-energy ion sputtering of solids

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Published in 2020 at "Journal of Vacuum Science and Technology"

DOI: 10.1116/6.0000262

Abstract: In this paper, we demonstrate that the sputtering of solids by ions of low ( read more here.

Keywords: ion sputtering; energy; nonlinear effects; sputtering solids ... See more keywords