Comparative study of ionic bombardment and heat treatment on the electrical behavior of Au/GaN/n-GaAs Schottky diodes
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DOI: 10.1016/j.spmi.2019.106276
Abstract: Abstract In this paper, two different cleaning methods before nitridation of the Au/GaN/n-GaAs Schottky diodes are investigated. Batch 1 is cleaned chemically and followed by ionic bombardment in an ultra-high vacuum chamber (UHV). On the… read more here.
Keywords: ionic bombardment; schottky diodes; gaas schottky; gan gaas ... See more keywords