Irradiation-driven molecular dynamics simulation of the FEBID process for Pt(PF3)4
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DOI: 10.3762/bjnano.12.86
Abstract: This paper presents a detailed computational protocol for the atomistic simulation of formation and growth of metal-containing nanostructures during focused electron beam-induced deposition (FEBID). The protocol is based upon irradiation-driven molecular dynamics (IDMD), a novel… read more here.
Keywords: methodology; febid; formation; irradiation driven ... See more keywords