A Silicon Resonant Accelerometer Embedded in An Isolation Frame with Stress Relief Anchor
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DOI: 10.3390/mi10090571
Abstract: Bias thermal sensitivity is a significant performance parameter of a silicon resonant accelerometer (SRA) and is normally used to evaluate the degree of engineering practicability. Theoretical analysis demonstrates that temperature-induced stress is the dominant factor… read more here.
Keywords: isolation frame; frame stress; stress; resonant accelerometer ... See more keywords