Effect of isopropanol on gold assisted chemical etching of silicon microstructures
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DOI: 10.1016/j.mee.2017.02.008
Abstract: Abstract Wet etching is an essential and complex step in semiconductor device processing. Metal-Assisted Chemical Etching (MacEtch) is fundamentally a wet but anisotropic etching method. In the MacEtch technique, there are still a number of… read more here.
Keywords: isopropanol gold; gold assisted; effect isopropanol; chemical etching ... See more keywords