Making insulating Al2O3 electrically conductive without loss of translucency using a small amount of ITO grain boundary phase
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DOI: 10.1016/j.scriptamat.2018.09.009
Abstract: Abstract The electrical conductivity of Al2O3 must be improved from 10−16 S/cm to the range between 10−5 and 100 S/cm, when insulating Al2O3 parts are employed for semiconductor manufacturing equipment. To remain the advantages of Al2O3 ceramics,… read more here.
Keywords: using small; small amount; amount; insulating al2o3 ... See more keywords