Effect of ITO target crystallinity on the properties of sputtering deposited ITO films
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DOI: 10.1016/j.ceramint.2019.11.110
Abstract: Abstract The crystallinity of Indium tin oxide (ITO) targets has crucial effect on the photoelectric properties of ITO films, which has only rarely been reported. In this study, ITO targets with different crystallinities were used… read more here.
Keywords: ito films; ito; crystallinity; ito target ... See more keywords