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Published in 2021 at "Journal of Vacuum Science and Technology"
DOI: 10.1116/6.0000642
Abstract: In this work, we demonstrate controlled area-selective deposition of aluminum oxide phosphate (AlPO) at room temperature and near atmospheric pressure using a potentially zero-waste aerosol jet fog (ajFOG) deposition system. Octyl-trichlorosilane (OTS-8) self-assembled monolayers (SAMs)…
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Keywords:
area selective;
area;
deposition;
aerosol jet ... See more keywords