Use of statistical design of experiments for surface modification of Kapton films by CF4-O2 microwave plasma treatment
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DOI: 10.1016/j.apsusc.2017.05.140
Abstract: Abstract A statistical design of experiments (DoE) was used to evaluate the effects of CF4 O2 plasma on Kapton films in which the duration of treatment, volume ratio of plasma gases, and microwave power were… read more here.
Keywords: statistical design; plasma; treatment; kapton ... See more keywords